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发明名称
DEPOSITION METHOD USING A THERMAL PLASMA EXPANDED BY A REPLACEABLE PLATE
摘要
申请公布号
EP1664378(B1)
申请公布日期
2008.12.17
申请号
EP20040783129
申请日期
2004.09.03
申请人
SABIC INNOVATIVE PLASTICS IP B.V.
发明人
SCHAEPKENS, MARK;IACOVANGELO, CHARLES, DOMINIC;MIEBACH, THOMAS
分类号
C23C16/513;H01J37/32
主分类号
C23C16/513
代理机构
代理人
主权项
地址
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