ZINC OXIDE TARGET AND MANUFACTURING METHOD OF PRODUCING THE SAME

摘要

A zinc oxide target and a manufacturing method thereof are provided to cut down the material cost of the process by collecting the material powder from the removed sputtering target. A manufacturing method of the zinc oxide target comprises the following steps: the step for taking away the sputtered zinc oxide lungs target(S11); the mastication step for pulverizing the zinc oxide lungs target and forming the comminuted powder(S12); the dissolution step for dissolving the comminuted powder and forming the zinc solution(S13); the powder formation step for heat-decomposing the zinc solution from spraying and forming the zinc oxide powder(S14); the molding step for collecting the zinc oxide powder and manufacturing the molding product(S15); the sintering step for sintering the molding product(S16).