发明名称 |
HIGH PERFORMANCE MINIATURE RF SENSOR FOR USE IN MICROELECTRONICS PLASMA PROCESSING TOOLS |
摘要 |
<p>A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.</p> |
申请公布号 |
EP2002270(A2) |
申请公布日期 |
2008.12.17 |
申请号 |
EP20070753542 |
申请日期 |
2007.03.20 |
申请人 |
INFICON, INC. |
发明人 |
GARVIN, CRAIG;BONNER, MICHAEL;ROSYS, KENNETH |
分类号 |
G01R27/26;G01R31/02;H01J37/32 |
主分类号 |
G01R27/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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