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发明名称
温度控制设备
摘要
申请公布号
CN300861365D
申请公布日期
2008.12.17
申请号
CN200730083038.0
申请日期
2007.11.21
申请人
上海微电子装备有限公司
发明人
赵 辉
分类号
10-05
主分类号
10-05
代理机构
上海思微知识产权代理事务所
代理人
屈 蘅;李时云
主权项
地址
201203上海市张江高科技园区张东路1525号
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