摘要 |
1,220,184. Resistors. WESTERN ELECTRIC CO. Inc. 29 Feb., 1968 [9 March, 1967], No. 9856/68. Heading H1S. A contact termination for a sputtered tantalum nitride resistor on a ceramic or glass substrate comprises a first layer of Cr or a Ni-Cr alloy maximum 80% Ni deposited on the tantalum nitride, a second layer selected from Pt, Pd, Ru and Rh and a third layer of Au. The layers are vapour deposited through a mask to give the required resistance which is controlled by deposition on a monitoring substrate. First layer thickness 100-800 Š, second layer 2500-3500 Š and third layer 3200-4500 Š. |