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发明名称
Gas laser
摘要
申请公布号
EP1039595(B1)
申请公布日期
2008.12.17
申请号
EP20000302417
申请日期
2000.03.24
申请人
OHMI, TADAHIRO;CANON KABUSHIKI KAISHA
发明人
OHMI, TADAHIRO;SUZUKI, NOBUMASA;OHSAWA, HIROSHI;TANAKA, NOBUYOSHI;SHINOHARA, TOSHIKUNI;HIRAYAMA, MASAKI
分类号
H01L21/027;H01S3/0975;G03F7/20;H01S3/03;H01S3/0973;H01S3/225
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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