| 摘要 |
An ion air knife and a substrate cleaning system using the air knife are provided to maximize the stability and productivity by efficiently removing foreign material and electric charge material. An air knife(210) is placed on an upper part of a conveyor. The air knife injects compressed air to a substrate(220) a substrate which is transferred along the conveyor, and dries the substrate. A plurality of air inlets(213) located at the side of the air knife module inflows the compressed air to the air knife module(213). An electrode tip(214) suppresses the generation of an electro static discharge at the top of the substrate by injecting ionized gas to the substrate. A slit nozzle(215) discharges the compressed air and ionized gas. |
