GROWTH METHOD FOR ZINC OXIDE USING PLATINUM AS A SUBSTRATE AND DEVICE MANUFACTURING METHOD USING THE SAME

摘要

A growth method for zinc oxide using platinum as a substrate and a device manufacturing method using the same are provided to effectively grow the monocrystalline zinc oxide of high quality. The growth process of the zinc oxide comprises the following steps: the step for forming the platinum substrate by growing the platinum layer on the substrate; the step for growing the zinc oxide by depositing the thin film in which the zinc oxide is included on the platinum substrate. The forming method of platinum layer includes the step for forming the titanium(Ti), the oxide titanium(TiO2), and the oxidation silicon(SiO2) as the buffer layer on the substrate; the step for growing the platinum substrate to have the orientation.