发明名称 ROTATOR, TEST HANDLER HAVING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR USING THE SAME
摘要 A rotator, test handler having the same, and method of manufacturing semiconductor using the same is provided to reduce the load applied to the rotor and control the rotation of a test tray. A rotator includes the main body member(2) and the driving part(3) and the main body member includes a shaft linkage(21) and a drive linkage(22). A driving linkage is formed with spaced apart from the rotation linkage by a creation distance. The drive linkage receives rotation power and a test tray is held with the main body member when rotating around the rotation axis. The driving unit provides driving force for rotation to the main body member through the drive linkage.
申请公布号 KR20080109397(A) 申请公布日期 2008.12.17
申请号 KR20070057660 申请日期 2007.06.13
申请人 MIRAE CORPORATION 发明人 KIM, YONG SUN;LEE, SANG KUIN;CHOI, JI HOON;LEE, HO KEUN
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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