| 摘要 |
A heating treatment apparatus is provided to prevent the problem that substrate is slid in a heating treatment apparatus by including a lift bar which loads and unloads substrate. A heating treatment apparatus(200) comprises a plate(210), and a lift bar(220). The substrate(230) is placed on plate. The lift bar is arranged in the plate. The lift bar is the line-shape which is comprised in order to load and unload substrate from the plate. The plate comprises a plurality of hotwires (ramp) in the plate bottom. In the lift bar, two lift bars are arranged in the edge area of the plate.
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