NITROGEN CONTAINED-DLC(DIAMOND LIKE CARBON) FILM MANUFACTURING METHOD AND PRODUCTS

摘要

A DLC (Diamond like carbon) method of coating and the product in which the nitrogen having corrosion resistance is contained are provided. A DLC method of coating in which the nitrogen occurs plentifully performs a sputtering process(P10) pre-processing the substrate surface; an underlying layer formation process(P20) forming the underlying layer which becomes nano in the substrate surface; and a DLC layer coating process(P30) coating the DLC(Diamond Like Carbon) layer in which the pulverized body is not generated in the lower limb surface and the hardness is improved.