发明名称 |
SCANNING NANOJET MICROSCOPE AND THE OPERATION METHOD THEREOF |
摘要 |
The inventive scanning nanojet microscope comprises one or several nozzles for producing an agent scanning jet and a system for collecting a radiation obtained in the area where the jet contacts an object. The nozzle is embodied in the form of an optical resonator made from a light-transparent capillary into which walls a narrow band light radiation is introduced by means of a light guide. The capillary length is selected is such a way that it is multiple of the light radiation half-wavelength. The inventive method consists in producing a heterogeneous light pressure on the jet and in carrying out the object three-dimensional scanning, wherein the interruption of the light radiation interrupts the jet and the microscope resolving power is defined by the jet diameter. Said microscope can be used in a scanning jet lithography for controlling a production process in a real-time mode. The microscope makes it possible to non-destructively study dielectrical and biological objects devoid of a current-conducting coating and to monitor a living cell in a real-time |
申请公布号 |
EP1953763(A4) |
申请公布日期 |
2008.12.17 |
申请号 |
EP20060804610 |
申请日期 |
2006.11.02 |
申请人 |
ILYANOK, ALEXANDER MIKHAILOVICH |
发明人 |
TIMOSHCHENKO, IGOR ANDREEVICH |
分类号 |
B82B3/00;G01Q60/00;G01Q80/00;G03F7/00;G03F7/20 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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