发明名称 DOUBLE PICK UP CYLINDER FOR ELEMENT OF SEMICONDUCTOR
摘要 A double pick-up cylinder for the semiconductor device is provided to contain the minute position error in a process by transferring two devices at the same time. A double pick-up cylinder for the semiconductor device comprises 2 vacuum shafts(2,3), 2 piston rods(4,5), the fitting block(6), the holder(7) and the fitting block(8). The vacuum shaft is equipped in one cylinder body(1) comprising the body. The piston rod is equipped in one cylinder body in order to move up and down the vacuum shaft with pneumatic. The fitting block connects one piston rod and the vacuum shaft. The fitting block consists of one body in order to provide the suction air. The holder and fitting block connect the piston rod and the vacuum shaft. The holder and fitting block is laminated in order to control the pitch of the fitting plug in which the suction air is provided.
申请公布号 KR20080109289(A) 申请公布日期 2008.12.17
申请号 KR20070057424 申请日期 2007.06.12
申请人 MASTER TECH CO., LTD. 发明人 JU, YONG CHEOL;PARK, HYUN WOOK
分类号 H01L21/68 主分类号 H01L21/68
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