发明名称 PATTERN FORMING METHOD
摘要 Patterns (27, 28, 29) developed on an intaglio plate are transferred onto an electrode layer (32) on a side of a surface (31a) facing a medium (31) to which the patterns are to be transferred, then, the work is heated and the electrode layer (32) is eliminated or permitted to have high resistance in the baking furnace (40), by using the intaglio plate for holding the patterns by a developer, a transfer apparatus for transferring the patterns (27, 28, 29) developed on the intaglio plate onto the medium (31), and a baking furnace (40) for eliminating an electrode layer (32) or permitting the electrode layer to have high resistance. ® KIPO & WIPO 2009
申请公布号 KR20080109083(A) 申请公布日期 2008.12.16
申请号 KR20087027623 申请日期 2007.05.08
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAITO MITSUNAGA;SHINJIYO YASUSHI;TAJIMA YOSHIHIRO;ISHII KOICHI;HOSOYA MASAHIRO;TAKAHASHI KEN
分类号 H01L21/3205;G09F9/00 主分类号 H01L21/3205
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