发明名称 |
System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixel |
摘要 |
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
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申请公布号 |
US7465913(B2) |
申请公布日期 |
2008.12.16 |
申请号 |
US20060500232 |
申请日期 |
2006.08.04 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
CHUANG YUNG-HO;ARMSTRONG J. JOSEPH;BROWN DAVID LEE;TSAI BIN-MING B. |
分类号 |
H01L31/00;H01J40/14;H01L27/146 |
主分类号 |
H01L31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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