| 摘要 |
A method of detecting a porous material (1) defect for detecting a defect by irradiating fine particles (12) discharged from the porous material (1) with a beam light (13) and detecting the gray level of scattered light from the fine particles (12) to specify a defect position, the method detecting the gray level of scattered light at a position facing the beam light (13). Preferably, the method of detecting a porous material (1) defect detects the gray level of the scattered light at detection position (16) where R1 is within a 0-80‹range, when the light source of the beam light (13) is the origin (11), a position equivalent to the center portion of a surface onto which fine particles (12) of the porous material (1) are discharged on a plane formed by the beam light (13) is a center point (C2), a line extending from the origin (11) toward the center point (C2) is l1, a line extending from the original (11) toward the detection point (16) of the scattered light is l2, and an angle formed by l1 and l2 on the plane formed by the beam light (13) is R1. The method of detecting a porous material defect can detect a defect with a good sensitivity. ® KIPO & WIPO 2009
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