发明名称 |
Method of recycling inert gas |
摘要 |
A method for recycling an inert gas evacuated from a material deposition process chamber 10 comprises cooling the evacuated inert gas and recirculating a proportion of the cooled gas to the chamber 10 at a first temperature for use as a cooling gas in the material deposition process 12, and recirculating a proportion of the cooled gas to the chamber 10 at a second temperature for use as a shielding gas in the material deposition process 12, the second temperature being higher than the first temperature. Apparatus 22 for recycling an inert gas is also disclosed.
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申请公布号 |
US7465476(B2) |
申请公布日期 |
2008.12.16 |
申请号 |
US20050176305 |
申请日期 |
2005.07.08 |
申请人 |
ROLLS-ROYCE PLC |
发明人 |
CLARK DANIEL;ALLEN JEFFREY;BURROWS JUSTIN M |
分类号 |
B05D1/40;C23C4/12;C23C8/00;C23C26/00 |
主分类号 |
B05D1/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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