Piezoelectric actuator, method for producing piezoelectric actuator, liquid transporting apparatus, and method for producing liquid transporting apparatus

摘要

Thickness of a piezoelectric layer 31 is measured and widths of individual electrodes 32 are determined based on an amount of deviation of the measured thickness of the piezoelectric layer 31 from a predetermined reference thickness set in advance for the piezoelectric layer 31. Individual electrodes 32 of the determined widths are then formed on a side opposite to pressure chambers 14 of the piezoelectric layer 31. It is therefore possible to easily compensate for fluctuation in the thickness of the piezoelectric layer 31 with the widths of individual electrodes 32. As a result, it is possible to provide a piezoelectric actuator for liquid transporting apparatus, and a method for manufacturing a piezoelectric actuator or the like which is capable of compensating for the fluctuation in thickness of the piezoelectric layer with electrode width.