发明名称 In-situ functionalization of carbon nanotubes
摘要 An embodiment of the present invention is a technique to functionalize carbon nanotubes in situ. A carbon nanotube (NT) array is grown or deposited on a substrate. The NT array is functionalized in situ with a polymer by partial thermal degradation of the polymer to form a NT structure. The functionalization of the NT structure is characterized. The functionalized NT structure is processed according to the characterized functionalization.
申请公布号 US7465605(B2) 申请公布日期 2008.12.16
申请号 US20050304403 申请日期 2005.12.14
申请人 INTEL CORPORATION 发明人 RARAVIKAR NACHIKET R.;MATAYABAS, JR. JAMES C.
分类号 H01L51/40 主分类号 H01L51/40
代理机构 代理人
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