发明名称 |
In-situ functionalization of carbon nanotubes |
摘要 |
An embodiment of the present invention is a technique to functionalize carbon nanotubes in situ. A carbon nanotube (NT) array is grown or deposited on a substrate. The NT array is functionalized in situ with a polymer by partial thermal degradation of the polymer to form a NT structure. The functionalization of the NT structure is characterized. The functionalized NT structure is processed according to the characterized functionalization.
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申请公布号 |
US7465605(B2) |
申请公布日期 |
2008.12.16 |
申请号 |
US20050304403 |
申请日期 |
2005.12.14 |
申请人 |
INTEL CORPORATION |
发明人 |
RARAVIKAR NACHIKET R.;MATAYABAS, JR. JAMES C. |
分类号 |
H01L51/40 |
主分类号 |
H01L51/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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