发明名称 Semiconductor device with fixed channel ions
摘要 A method for manufacturing a semiconductor device includes subjecting a semiconductor substrate to thermal treatment at a temperature ranging from 770 to 830° C. to fix channel ions then forming a HTO film. The method thereby prevents a threshold voltage of a gate from changing due to diffusion of channel ions.
申请公布号 US7465643(B2) 申请公布日期 2008.12.16
申请号 US20060543071 申请日期 2006.10.05
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM DAE YOUNG
分类号 H01L21/00;H01L21/44 主分类号 H01L21/00
代理机构 代理人
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