发明名称 Plasma-assisted nitrogen surface-treatment
摘要 Methods and systems (10) for plasma-assisted nitrogen surface-treatments are provided. The method can include subjecting a gas (24) to electromagnetic radiation (26) in the presence of a plasma catalyst (100, 120, 140) to initiate a plasma containing nitrogen. The surface region of an object can be exposed to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the surface region.
申请公布号 US7465362(B2) 申请公布日期 2008.12.16
申请号 US20050513607 申请日期 2005.07.05
申请人 BTU INTERNATIONAL, INC. 发明人 KUMAR DEVENDRA;KUMAR SATYENDRA
分类号 C23C8/36 主分类号 C23C8/36
代理机构 代理人
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