X-Y TABLE ACTUATOR

摘要

Provided is an X-Y table actuator which can move and position a movable table (5) freely in an X-Y plane with a sufficient thrust and which can be simply manufactured at a low cost. The X-Y table actuator is constituted by stacking a stationary plate (2), an intermediate plate (4) and a movable plate (5). Between the stationary plate (2) and the intermediate plate (4), there is arranged X-direction drive means for driving the intermediate plate (4) in an X-direction with respect to the stationary plate (2). Between the intermediate plate (4) and the movable plate (5), on the other hand, there is disposed Y-direction drive means (7) for propelling the movable plate (5) in a Y-direction with respect to the intermediate plate (4). The stationary plate (2) and the movable plate (5), which are formed generally in a channel shape, and the intermediate plate (4), which is formed generally in a flat shape, are stacked to form a housing chamber (60) for the X-direction drive means between the stationary plate (2) and the intermediate plate (4), and a housing chamber (70) for the Y-direction drive means between the intermediate plate (4) and the movable plate (5).