| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-output multilayer piezoelectric element, and to provide a manufacturing method for obtaining a multilayer piezoelectric element of extremely high quality stably with excellent productivity. <P>SOLUTION: In a multilayer piezoelectric element 1 formed by laminating n unit layers 10a and 10b consisting of inner-electrode layers 120a, 120b and piezoelectric ceramic layers 100a, 100b such that the polarization P is reversed for every layer in the thickness direction, low resistance regions 110a, 110b, 111a and 111b having a relatively low electric resistance as compared with other regions in the same piezoelectric ceramic layer are formed by dividing the piezoelectric ceramic layers 100a and 100b into a plurality of regions. Since the electric field density becomes high in the low-resistance regions, regions HR of high electric field density and regions LR of low electric field density coexist in the piezoelectric ceramic layers 100a and 100b, and the piezoelectric ceramic layer is warped by a difference of output displacement due to a difference of electric field density. The displacement dS due to the warpage and the displacement dL due to peculiar counter piezoelectric effect are combined to produce a big output displacement. <P>COPYRIGHT: (C)2009,JPO&INPIT |
