METHOD AND APPARATUS FOR MULTIFUNCTIONAL MACHINING CONTROL OF LASER BEAM MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for multifunctional machining control of a laser beam machine capable of freely performing the machining-control of various kinds of patterns on a surface of a workpiece such as a flat surface of a flat plate workpiece and a thick workpiece or a gentle three-dimensional surface.

SOLUTION: The femtosecond laser beam LO of the linear polarization emitted from a femtsecond laser generator 10 is the laser beam which is intermittently applied by the opening/closing control by a shutter ST. The laser beam is condensed by a condensing lens R3 via any one of a homogenizer H1 for periodic grooves, a homogenizer H2 for dimple machining and a homogenizer H3 for mix-machining which are change-selected by a changing means HD. The laser beam is applied to a surface W1 of a flat workpiece W mounted on a workpiece moving unit 50 capable of performing the rotational drive and the three-dimensional movement.

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