| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a perpendicular magnetic recording head for achieving high recording area densities up to 500 Gbit/in<SP>2</SP>. <P>SOLUTION: A pair of bottom side shields 20 and a pair of non-magnetic material layers 30 are formed by forming non-magnetic layers on a lower side shield forming layer, selectively etching them, and forming a groove 800 having a truncated wedge-shaped sectional shape. Next, a magnetic pole tip part 10 of a magnetic pole 100 is formed inside the groove 800 so as to be separated from the pair of lower side shields 20 via a side gap layer 50. Finally, an upper shield 80 is formed above the magnetic pole tip part 10 so as to be separated from the magnetic pole tip part 10 via a recording gap layer 70. The magnetic pole tip part 10 is shielded from three directions of lower parts of both sides and the upper side by the pair of lower side shields 20 and the upper shield 80. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
