SEMICONDUCTOR NANOWIRE AND ITS MANUFACTURING METHOD

摘要

A method for manufacturing a semiconductor nanowire having a first region and a second region includes: a step [a] for arranging catalyst particles (101) on a substrate (102); a step [b] for supplying a first raw material gas (103) so that a first region (104) grows from the catalyst particles by the VLS growth mechanism; a step [c] for forming a protection film (105) on the side wall of the first region; and a step [d] for supplying a second raw material gas (107) so that a second region (106) grows on the first region by the VLS growth mechanism.