发明名称 PROCESS FOR MANUFACTURING POLISHING PAD
摘要 <p>A process for manufacturing a polishing pad excelling in optical detection precision while attaining prevention of slurry leakage from interspaces between polishing area and light transmission area. The process for manufacturing a polishing pad comprises the steps of preparing a urethane composition with dispersed foam according to a mechanical foaming method; while feeding out a face material or moving a belt conveyor, disposing a light transmission area on the face material or belt conveyor at a given location; continuously discharging the urethane composition with dispersed foam onto the section of the face material or belt conveyor not provided with the light transmission area; superimposing another face material or belt conveyor on the discharged urethane composition with dispersed foam; hardening the urethane composition with dispersed foam so as to form a polishing area of polyurethane foam thereby obtaining a polishing sheet, while conducting a thickness regulation into uniformity,; coating one surface of the polishing sheet with a polyurethane resin coating material containing an aliphatic and/or alicyclic polyisocyanate and hardening the same to thereby provide a water impermeable film; and cutting the polishing sheet.</p>
申请公布号 WO2008149650(A1) 申请公布日期 2008.12.11
申请号 WO2008JP58911 申请日期 2008.05.15
申请人 TOYO TIRE & RUBBER CO., LTD.;SATO, AKINORI;HIROSE, JUNJI;NAKAMURA, KENJI;FUKUDA, TAKESHI;DOURA, MASATO 发明人 SATO, AKINORI;HIROSE, JUNJI;NAKAMURA, KENJI;FUKUDA, TAKESHI;DOURA, MASATO
分类号 B24B37/20;B24B37/22;B24B37/24;H01L21/304 主分类号 B24B37/20
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