| 发明名称 |
SHOT LAYOUT EDITING METHOD, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To intuitively and easily perform the operation of editing and re-editing even with such layout that different shot sizes coexist. <P>SOLUTION: In the case of performing the editing of such layout that different shot sizes coexist according to the setting of a masking blade, a plurality of types of grids corresponding to various shot sizes are prepared for performing layout editing based on each grid information. <P>COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2008300725(A) |
申请公布日期 |
2008.12.11 |
| 申请号 |
JP20070146760 |
申请日期 |
2007.06.01 |
| 申请人 |
CANON INC |
发明人 |
KOBAYASHI MASAHIKO;KOJIMA YUJI |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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