| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the number of wirings in an exposure device. <P>SOLUTION: The exposure device 100 for exposing a wafer W and forming a prescribed pattern is provided with a signal transmitter 61 for converting signals from a plurality of sensors to vibration waves and propagating them to a device main body BD, and an acceleration sensor 60 for detecting the vibration waves transmitted through the body BD at a position separated from the signal transmitter 61. Thus, since the signals from the sensor can be transmitted to the acceleration sensor without wiring, the number of wirings can be substantially reduced. <P>COPYRIGHT: (C)2009,JPO&INPIT |
