| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-output multilayer piezoelectric element, and to provide a manufacturing method for obtaining a multilayer piezoelectric element of extremely high quality stably with excellent productivity. <P>SOLUTION: Inner-electrode layers 120a, 120b formed on the surface of piezoelectric ceramic layers 100a and 100b are divided into a plurality of regions and formed such that low resistance regions 121a and 121b having a relatively low electric resistance as compared with other regions in the same inner-electrode layer are distributed. Since the regions HR of high electric field density and the regions LR of low electric field density coexist in the piezoelectric ceramic layers 100a and 100b, a difference arises in the amount of output displacement and the piezoelectric ceramic layer is warped. The displacement dS due to the warpage and the displacement dL of the piezoelectric ceramic layer due to inverse piezoelectric effect are combined to produce a big output displacement. <P>COPYRIGHT: (C)2009,JPO&INPIT |
