| 摘要 |
The invention relates to a probe card assembly comprising a stiffener (1), comprising a PCB (2) disposed in the stiffener (1), and comprising a spider (3) supported by the stiffener and the PCB (2), said spider comprising at least one probe (30) to test a wafer (5). This probe card assembly of the PCB (2) is supported in a loosely decoupled manner in the stiffener (1) to prevent transmission of high thermally-induced warping effects.
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