| 摘要 |
An absorbing method and a storage medium are provided to decrease the time required for the vacuum suction without causing the fault based on the moisture. An absorbing method of the vacuum processing device including vacuum process room includes the following steps: the first pressure adjustment step which is the sub atmospheric pressure and maintains the pressure within the vacuum process room over 6.7Î102 Pa (5Torr) in the vacuum suction; the second pressure adjustment step which boosts up the pressure in the vacuum process room higher than the pressure of the first pressure adjustment step and lower than the pressure of the sub atmospheric pressure, following the first pressure adjustment step.
|
