METHOD OF MANUFACTURING STRUCTURE ON SUBSTRATE OR IN SUBSTRATE, IMAGING LAYER FOR GENERATING SUBLITHOGRAPHIC STRUCTURE, METHOD OF INVERTING SUBLITHOGRAPHIC PATTERN, AND DEVICE OBTAINABLE BY MANUFACTURING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a structure on a substrate or in a substrate.

SOLUTION: The method of manufacturing the structure on or in the substrate comprises: (a) a process of positioning at least one spacer structure 30 by a spacer technology on the substrate 10; (b) a process of using the at least one spacer structure and a structure generated by the spacer structure as a mask for a subsequent particle irradiation step for generating a latent image in the substrate; and (c) a process of using the latent image for further processing the substrate.

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