| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein difficulty exists in automation of surface defect inspection by conventional technology, because the surface of a metallic member, or the like and surface with metallic coating formed thereon, which reflect totally or substantially totally reflect optically, has strong specular light by total reflection, and it is difficult to detect randomly reflected light which is useful in detecting a surface defect. SOLUTION: The automatic inspection device and inspection method detect the surface defect of an evaluated object, especially of a member and component in a mirror surface state with the metallic coating formed thereon by combining a process for measuring a plurality of surface images by fixing the evaluated object and a camera; changing the position of a point light source or sequentially lighting point light sources arranged at a plurality of positions; a process for eliminating strong specular reflection, by using a metallic surface reflection model and extracting fine random reflection, a process for eliminating noise and sharpening the defects by using complex discrete wavelet transforms; and a process for detecting defects through pattern matching. COPYRIGHT: (C)2009,JPO&INPIT
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