| 摘要 |
PROBLEM TO BE SOLVED: To easily irradiate an ion beam on a non-irradiated section even though the ion beam is stopped during irradiation of the ion beam. SOLUTION: When an output of the ion beam 8 is stopped while a workpiece 1 is moved in a first movement direction, the workpiece 1 is moved in the first movement direction to an evacuation position where the ion beam 8 is not irradiated while the ion beam 8 is stopped. The ion beam 8 is again output on the evacuation position, the re-output ion beam 8 is irradiated on the workpiece 1 by moving the workpiece 1 in a second movement direction opposite to the direction of the first movement. An irradiation range of the ion beam 8 during first stopping of the ion beam 8 and an irradiation range of the re-output ion beam 8 are overlapped at least at a part of the ranges, and output of the re-output ion beam 8 is stopped so that the length of overlapped irradiation range in the direction of movement of the workpiece 1 does not exceed a dimension in the direction of the movement of the workpiece 1. COPYRIGHT: (C)2009,JPO&INPIT
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