发明名称 METHOD FOR PRODUCING A MEMS PACKAGE
摘要 In order to encapsulate a MEMS chip, said chip is placed on a planarised metal frame arranged on a ceramic carrier substrate. In addition, in a thermal step, the electrical connection is created between the MEMS chip and contacts on the carrier substrate by means of bumps, and a sufficiently tight and mechanically stable connection is created between the metal frame and the MEMS chip.
申请公布号 WO2008148736(A2) 申请公布日期 2008.12.11
申请号 WO2008EP56787 申请日期 2008.06.02
申请人 EPCOS AG;BAUER, CHRISTIAN;FEIERTAG, GREGOR;KRUEGER, HANS;STELZL, ALOIS 发明人 BAUER, CHRISTIAN;FEIERTAG, GREGOR;KRUEGER, HANS;STELZL, ALOIS
分类号 B81C1/00 主分类号 B81C1/00
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