MASK MOLD, ITS MANUFACTURING METHOD AND MOLDING METHOD OF LARGE-AREA MICRO-PATTERN USING MANUFACTURED MASK MOLD

摘要

PROBLEM TO BE SOLVED: To provide a mask mold and its manufacturing method, and to provide a molding method of a large-area micro-pattern by using the manufactured mask mold which can enlarge a nano-scale micro-pattern area and minimizing interference and a stitching error between large area cells by a simple way and at a low cost.

SOLUTION: The pattern molding method includes; a step (S 140) of applying resists on a plurality of small molds marked with the masks or the micro-patterns, a step (S 150) of pressing the plurality of small molds and imprinting the micro-pattern of a curing resist, a step of curing the resist and a step (S 170) of releasing the plurality of small molds from the resist.

COPYRIGHT: (C)2009,JPO&INPIT