发明名称 HEAT TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of heat-treating a plurality of objects to be heat-treated as they are housed in a magazine, and performing a plurality of heat-treatment processes concurrently. SOLUTION: A heat-treatment apparatus 30 comprises a roughly rectangular solid-shaped rack 30a, seven units of heating devices 10 housed in the rack 30a in a manner that they can be taken in and out, and a control device 32 for controlling the heat-treatment processes of the heating devices 10 independently. Each of the heating devices 10 has a magazine chamber for housing a magazine in which objects to be heat-treated are housed in a manner that it can be taken in and out, and heat-treating the objects. Above each of the heating devices 10, there disposed is a display panel 33 having pilot lamps 33a and 33b for indicating the operation status of each of the heating devices 10. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008298977(A) 申请公布日期 2008.12.11
申请号 JP20070143694 申请日期 2007.05.30
申请人 KYUSHU NISSHO:KK 发明人 TOMARI YOSHIYASU;MORIMOTO TOYOTOSHI
分类号 G02F1/13;H01L21/50 主分类号 G02F1/13
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