| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of simultaneous forming a focusing spot shape into a true circle and an ellipse. <P>SOLUTION: The laser beam machining apparatus is provided with: a beam splitter 63 splitting laser light from a laser beam oscillation means 61 into the first laser light and the second laser light; a rotaryλ/2 wavelength plate 64 arranged between the laser beam oscillating means and the beam splitter; a focusing lens 651 arranged at a first optical path introducing the first laser beam; a first reflection mirror 66 arranged at a second optical path introducing the second laser beam; a firstλ/4 wavelength plate 67 arranged between the beam splitter and the first reflection mirror; a second reflection mirror arranged at a third optical path where the second laser beam returned to the beam splitter via the second optical path is split, a secondλ/4 wavelength plate 69 arranged between the beam splitter and the second reflection mirror; and a cylindrical lens 70 arranged between the beam splitter and the secondλ/4 wavelength plate. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
