| 发明名称 |
TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS |
| 摘要 |
In the nanoimprint lithography, a titania-doped quartz glass having a CTE of -300 to 300 ppb/° C. between 0° C. and 250° C. and a CTE distribution of up to 100 ppb/° C. at 25° C. is suited for use as nanoimprint molds.
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| 申请公布号 |
US2008305941(A1) |
申请公布日期 |
2008.12.11 |
| 申请号 |
US20080133007 |
申请日期 |
2008.06.04 |
| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
MAIDA SHIGERU;OTSUKA HISATOSHI |
| 分类号 |
C03C3/06 |
主分类号 |
C03C3/06 |
| 代理机构 |
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