| 摘要 |
Flow rate control unit and flow rate control apparatus including the flow rate control unit are provided to improve the durability of the flow rate control unit since the flow rate is controlled by using the simple structure. Flow rate control unit and flow rate control apparatus including the flow rate control unit comprises an inlet path which is connected to the flow tube or the liquid port so that the fluid is flowed in from the flow tube or the liquid port, an outlet path which is connected to the inlet path so that the fluid be flowed out, a housing in which the respective connected communications path is formed with the inlet path and outlet path in inside, a valve member controlling the flow rate flowed out into the outlet path.
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