APPARATUS FOR TRANSFERRING WAFER

摘要

A wafer transfer device is provided to shorten the whole process time by standing by the transfer arm for transferring the wafer at the position close to the entrance of the processing chamber. A wafer transfer device(100) comprises the transfer chamber(110), and the transfer arm(120). The transfer chamber is connected to the processing chamber(300). The transfer chamber provides the space for transferring the wafer(200) to the processing chamber. The transfer arm is positioned in the processing chamber in order to stand by at the position close to the entrance of the processing chamber while the process of wafer is progressed. The transfer arm immediately transfers the wafer which is drawn from the processing chamber. The transfer arm includes the detecting sensor for detecting the transfer arm.