发明名称 METHOD FOR PRODUCING NITRIDE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To obtain a nitride single crystal such as a GaN single crystal having excellent crystallinity without using a seed crystal substrate in which an expensive GaN thin film is deposited. SOLUTION: In this method, the nitride single crystal is produced by growing a nitride single crystal 8 expressed by chemical formula XN (wherein, X is at least one kind selected from Ga, Al and In) on the surface of a seed crystal substrate 4 by a flux method. In the seed crystal substrate 4, the growth surface used for growing the nitride single crystal 8 is terminated with nitrogen. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008297189(A) 申请公布日期 2008.12.11
申请号 JP20070148083 申请日期 2007.06.04
申请人 KYOCERA CORP 发明人 INOUE SHINJI
分类号 C30B29/38;C30B19/02;H01L21/208 主分类号 C30B29/38
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