发明名称 METHOD OF PRODUCING A WAFER SCALE PACKAGE
摘要 The invention concerns a method for manufacturing a wafer scale package comprising at least one substrate having replicated optical elements. The method uses a two substrates, at least one of which is pre-shaped and has at least one recess in its front surface. Optical elements are replicated on a first substrate by causing a replication tool to abut at the first substrate. The second substrate is then attached to the first substrate in abutting relationship in such a way that the optical element is contained in a cavity formed by the recess in one of the substrates in combination with the other substrate. Thereby, a well defined axial distance between the optical elements and the second substrate is achieved. Consequently, also a well defined axial distance between the optical elements and any other objects attached to the second substrate, e.g. further optical elements, image capturing devices, light sources, is established.
申请公布号 WO2008116335(A3) 申请公布日期 2008.12.11
申请号 WO2008CH00122 申请日期 2008.03.19
申请人 HEPTAGON OY;RUDMANN, HARTMUT;HEIMGARTNER, STEPHAN;ROSSI, MARKUS 发明人 RUDMANN, HARTMUT;HEIMGARTNER, STEPHAN;ROSSI, MARKUS
分类号 H01L21/98;H01L25/16 主分类号 H01L21/98
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