发明名称 |
METHOD OF PRODUCING A WAFER SCALE PACKAGE |
摘要 |
The invention concerns a method for manufacturing a wafer scale package comprising at least one substrate having replicated optical elements. The method uses a two substrates, at least one of which is pre-shaped and has at least one recess in its front surface. Optical elements are replicated on a first substrate by causing a replication tool to abut at the first substrate. The second substrate is then attached to the first substrate in abutting relationship in such a way that the optical element is contained in a cavity formed by the recess in one of the substrates in combination with the other substrate. Thereby, a well defined axial distance between the optical elements and the second substrate is achieved. Consequently, also a well defined axial distance between the optical elements and any other objects attached to the second substrate, e.g. further optical elements, image capturing devices, light sources, is established. |
申请公布号 |
WO2008116335(A3) |
申请公布日期 |
2008.12.11 |
申请号 |
WO2008CH00122 |
申请日期 |
2008.03.19 |
申请人 |
HEPTAGON OY;RUDMANN, HARTMUT;HEIMGARTNER, STEPHAN;ROSSI, MARKUS |
发明人 |
RUDMANN, HARTMUT;HEIMGARTNER, STEPHAN;ROSSI, MARKUS |
分类号 |
H01L21/98;H01L25/16 |
主分类号 |
H01L21/98 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|