ENVIRONMENT CONTROL APPARATUS, STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

摘要

An environment control device includes a first member and a movable member. The first member forms a first space and has a first opening formed in at least a part of the first member and also has a first surface provided around the first opening. The movable member is placed to cover the first opening, has a second surface facing the first surface, and can move relative to the first opening while being guided by the first surface. A gas seal mechanism is formed between the first surface and the second surface, and the mechanism can set the first space to a predetermined condition.