| 摘要 |
PROBLEM TO BE SOLVED: To enable the correct inspection of the bulk or internal volume of the base material of the glass substrate in the method of inspecting a transparent substrate by providing a sufficient speed, not needing highly finished surface, not limited only to a glass sheet, the locations of impurities are detected at the specific positions, and designating a sufficient sensitivity for detecting extremely small impurities. SOLUTION: The refractive index matching liquid is given between the optical coupler and the surface of the transparent substrate for matching the refractive indexes. At the positions of 2 to further more positions along the surface of the transparent substrate, (i) the process for irradiating the inspection volume in the transparent substrate with light by the process for guiding the ribbon light into the transparent substrate through the optical coupler, and (ii) the process for detecting the scattering light from the inspection volume in the detector which is optically conjugate to the inspection volume are repeated. COPYRIGHT: (C)2009,JPO&INPIT
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