| 摘要 |
A charge-balance power device formed in an epitaxial layer having a first conductivity type and housing at least two columnar structures of a second conductivity type, which extend through the epitaxial layer. A first surface region of the second conductivity type extends along the surface of the epitaxial layer on top of, and in contact with, the columns, and a second surface region of the first conductivity type extends within the first surface region, and also faces the surface of the epitaxial layer. The columns extend at a distance from one another from the first surface region so as to delimit between them an epitaxial portion that defines a current path so as to reduce the on-resistivity of the device.
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