COIL SUPPORT UNIT, MOTOR AND EXPOSURE APPARATUS USING THE SAME, AND DEVICE MANUFACTURING METHOD

摘要

A coil support unit which supports a coil used for generating a thrust to a movable portion. The coil is supported such that stable thrust characteristics can be obtained. The coil support unit constrains the coil in a thrust direction, and slidably supports the coil in a direction perpendicular to the thrust direction, on a moving surface.