MONOLITHIC HIGH ASPECT RATIO NANO-SIZE SCANNING PROBE MICROSCOPE (SPM) TIP FORMED BY NANOWIRE GROWTH
摘要
A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
申请公布号
WO2008054467(A3)
申请公布日期
2008.12.11
申请号
WO2007US05743
申请日期
2007.03.08
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;COHEN, GUY, M.;HAMANN, HENDRIK, F.