| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress an increasing burden on a user which results from setting work for both appearance inspection and electrical characteristic inspection. <P>SOLUTION: In a substrate inspection system 10A, an appearance inspection apparatus 12 performs appearance inspection by taking an image of a substrate and inspecting the substrate for its mounting status by using the result of analysis of the taken image. An in-circuit tester 14 performs electrical characteristic inspection by bringing a probe into contact with the substrate to detect the electrical characteristics of the substrate and inspecting the substrate for its mounting status by using the detected electrical characteristics of the substrate. An inspection content setting screen is displayed on a display 18 to allow a user to determine the setting contents for conducting appearance inspection on the screen. The inspection contents setting screen is also used to allow the user to determine the setting contents for conducting electrical characteristics inspection, such as a decision on whether or not to conduct the electrical characteristic inspection. <P>COPYRIGHT: (C)2009,JPO&INPIT |
